A technique for aligning doublet and triplet lenses is described. The
first lens is fixed to the apparatus by means of a vacuum pump and ali
gned using an interferogram produced by the reflected beams from the f
ront and back lens surfaces. To obtain a measurement of the residual d
ecentering of the doublet or triplet lens, the present technique utili
zes the displacement of a reference beam that is produced after passin
g twice through the lens. The precision of the measurements can be sui
tably modified by changing the setup parameters. (C) 1996 Society of P
hoto-Optical instrumentation Engineers.