PARTICLE EMISSIONS FROM GAS HANDLING COMPONENTS MEASURED ACCORDING TOTHE SEMATECH TEST METHODS

Particle emission rates measured from ultra-high purity, cleanroom gas handling components following the test procedures specified in the SE MATECH test methods are described. A condensation nucleus particle cou nter (CNC) having a counting efficiency of 50 percent at 0.02 mum in d iameter was used to measure the total particle contribution from the g as handling components. A spool piece was inserted to measure the base line particle concentration of the test stand before the measurement o f the test component was carried out. Eighteen test samples, six each from three suppliers (two domestic and one foreign), in each type of g as handling components (valves, point-of-use filters, pressure regulat ors), were tested using the revised test method. Particle contribution data obtained for fresh out-of-the-bag, stainless steel (SS) test sam ples, 1/4-in. in OD, from different manufacturers are summarized in th is paper.