GETTERING OF COPPER TO HYDROGEN-INDUCED CAVITIES IN SILICON

Authors
WONGLEUNG J ASCHERON CE PETRAVIC M ELLIMAN RG WILLIAMS JS
Citation
J. Wongleung et al., GETTERING OF COPPER TO HYDROGEN-INDUCED CAVITIES IN SILICON, Applied physics letters, 66(10), 1995, pp. 1231-1233
Citations number
18
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
10
Year of publication
1995
Pages
1231 - 1233
Database
ISI
SICI code
0003-6951(1995)66:10<1231:GOCTHC>2.0.ZU;2-C