MASS-SPECTROMETRIC CHEMICAL BALANCE OF CF4 DECOMPOSITION IN A PLASMA REACTOR

The decomposition of carbon tetrafluoride (CF4) in two types of plasma reactor has been investigated by using mass spectrometry. The optimiz ation of the plasma process requires the establishment of an adequate chemical balance between major components and also traces in the react or effluent, in order to minimize toxic emissions by control of the pr oper reactor parameters. On-line mass spectrometric characterization o f the effluent has been used to optimize the CF4 decomposition yield. A GC/MS protocol has been developed to quantify both major and minor c omponents of the effluent in order to evaluate its toxicity.