SYNTHESIS AND CHARACTERIZATION OF TIO2 THIN-FILMS ON ORGANIC SELF-ASSEMBLED MONOLAYERS .1. FILM FORMATION FROM AQUEOUS-SOLUTIONS

Self-assembled monolayers (SAMs) bearing sulfonate (-SO3H) surface fun ctional groups, on single-crystal Si wafers, were used as substrates f or the deposition of TiO2 thin films from aqueous solutions. Polycryst alline TiO2 thin films over 50 nm thick formed in 2 h by hydrolysis of TiCl4 in aqueous HCl solutions at 80 degrees C, The films were pore-f ree, showed excellent adherence and uniformity, and consisted of anata se crystallites 2-4 nm in diameter. Annealing at temperatures up to 60 0 degrees C caused coarsening of the anatase grains, but no loss of ad herence or structural integrity.