FABRICATION OF SR2NB2O7 THIN-FILMS BY SOL-GEL PROCESSING

Sol-gel Sr2Nb2O7 thin films were deposited on Si(100) and Pt-coated Si substrates for the first time by spin-coating. The Sr2Nb2O7 precursor solution was prepared from strontium metal dissolved in 2-methoxyetha nol, acetylacetone, and niobium ethoxide, The formation of phase pure Sr2Nb2O7 occurred via an intermediate perovskite phase of composition close to Sr0.82NbO3 Crack-free Sr2Nb2O7 films of similar to 0.4 mu m t hickness were deposited on these substrates using a single-coating fol lowed by heat treatment at 850 degrees C for 12 h. SEM microstructure and thin film XRD results indicated the deposition of a grain-oriented film on the Pt-coated Si substrate, The room temperature dielectric c onstant and the loss values of the film measured at 10 kHz are 45 and 0.045, respectively.