EXCIMER-LASER FOR MICROTECHNOLOGY

Authors
BALANDIN AN GARKUSHA BF GLUKHIKH IV GRAD AG ZHDANOV IV ZHELTOV VA KUZNETSOV VS YUDIN AM YASEVICH VY YATSENKO BP
Citation
An. Balandin et al., EXCIMER-LASER FOR MICROTECHNOLOGY, Instruments and experimental techniques, 37(5), 1994, pp. 606-611
Citations number
6
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
37
Issue
5
Year of publication
1994
Part
2
Pages
606 - 611
Database
ISI
SICI code
0020-4412(1994)37:5<606:EFM>2.0.ZU;2-D
Abstract
The paper describes an electric-discharge excimer laser whose average power using a He-Kr-F mixture is 10 W at a repetition rate of 100 Hz. The service life of the gas mixture lasts up to 2.10(6) laser pulses. The laser uses a fluorine generator that can fill the tube 300 times. Calculations of the optimal Kr and F-2 partial pressures are given. At a pulse energy of 100 mJ the beam divergence is 0.4 mrad, thus an ene rgy density of 0.1 MJ/cm(2) is produced at the focus of a lens with a 50-mm focal length.