MBE FACILITY WITH 2 SYNCHRONIZED MODULATED BEAMS

An experimental four-chamber MBE facility with two mutually synchroniz ed beams is described. A sapphire viewport can be used to study the ef fect of electromagnetic radiation (lambda = 250-4500 nm) on film conde nsation. The growth chamber has a quadrupole mass spectrometer and a r eflection high-energy electron diffractometer (RHEED). An Auger spectr ometer, RHEED diffractometer, ion etching system, and a quadrupole mas s-spectrometer are included in the analytical chamber. Given two trans fer mechanisms, a load-lock chamber, and a preparation chamber, substr ates can be replaced without breaking the vacuum in the growth and ana lytical chambers. A pumping system provides a vacuum of similar to (2- 3).10(-9) torr in the growth chamber and 4.10(-10) torr in the analyti cal chamber.