The mesh-structured emitter solar cell (MESC) is introduced as a novel
solar cell processing scheme. By the formation of inverted pyramids o
r microgrooves on a wafer with a homogeneous heavy phosphorus diffusio
n, a mesh of highly conducting emitter lines is formed. Using this tec
hnique, rite lateral conductivity of the emitter can be increased keep
ing the emitter dark saturation current at a low level. The high phosp
horus surface concentration results in a low contact resistance even f
or screen-printed contacts. Thus, this technique is ideal for solar ce
lls with screen-printed contacts, because the finger spacing of the fr
ont contact can be extended resulting in smaller shadowing losses, Als
o the processing scheme of high-efficiency solar cells can be simplifi
ed, because the formation of the surface texturization and the locally
deep diffused emitter can be combined in one step. The first cells wi
th a mesh-structured emitter, evaporated front contacts and local ohmi
c rear contacts have shown efficiencies up to 21.1%, Lifetime test str
uctures have been used to determine a low dark saturation current of 5
8 fA cm(-2) for the mesh-structured emitter, although the structure is
not yet optimized.