THERMAL-CONDUCTIVITY AND DIFFUSIVITY OF FREESTANDING SILICON-NITRIDE THIN-FILMS

Authors
ZHANG X GRIGOROPOULOS CP
Citation
X. Zhang et Cp. Grigoropoulos, THERMAL-CONDUCTIVITY AND DIFFUSIVITY OF FREESTANDING SILICON-NITRIDE THIN-FILMS, Review of scientific instruments, 66(2), 1995, pp. 1115-1120
Citations number
20
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
66
Issue
2
Year of publication
1995
Part
1
Pages
1115 - 1120
Database
ISI
SICI code
0034-6748(1995)66:2<1115:TADOFS>2.0.ZU;2-#