GETTERING EFFECTS IN BF2-IMPLANTED SI(100) BY ION-BEAM DEFECT ENGINEERING

Citation
Qt. Zhao et al., GETTERING EFFECTS IN BF2-IMPLANTED SI(100) BY ION-BEAM DEFECT ENGINEERING, Journal of applied physics, 77(10), 1995, pp. 5014-5019
Citations number
23
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00218979
Volume
77
Issue
10
Year of publication
1995
Pages
5014 - 5019
Database
ISI
SICI code
0021-8979(1995)77:10<5014:GEIBSB>2.0.ZU;2-I