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ITA
ENG
GETTERING EFFECTS IN BF2-IMPLANTED SI(100) BY ION-BEAM DEFECT ENGINEERING
Authors
ZHAO QT
WANG ZL
CAO YM
XU TB
ZHU PR
Citation
Qt. Zhao et al., GETTERING EFFECTS IN BF2-IMPLANTED SI(100) BY ION-BEAM DEFECT ENGINEERING, Journal of applied physics, 77(10), 1995, pp. 5014-5019
Citations number
23
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics
→
ACNP
ISSN journal
00218979
Volume
77
Issue
10
Year of publication
1995
Pages
5014 - 5019
Database
ISI
SICI code
0021-8979(1995)77:10<5014:GEIBSB>2.0.ZU;2-I