STABILITY OF C54 TITANIUM GERMANOSILICIDE ON A SILICON-GERMANIUM ALLOY SUBSTRATE

Authors
ALDRICH DB CHEN YL SAYERS DE NEMANICH RJ ASHBURN SP OZTURK MC
Citation
Db. Aldrich et al., STABILITY OF C54 TITANIUM GERMANOSILICIDE ON A SILICON-GERMANIUM ALLOY SUBSTRATE, Journal of applied physics, 77(10), 1995, pp. 5107-5114
Citations number
39
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
10
Year of publication
1995
Pages
5107 - 5114
Database
ISI
SICI code
0021-8979(1995)77:10<5107:SOCTGO>2.0.ZU;2-B