A 2-DIMENSIONAL MICROMACHINED ACCELEROMETER

A surface micromachined two-dimensional (2-D) accelerometer is designe d and implemented in CMOS, The implementation requires the addition of three masking steps to a commercially available standard CMOS process , It has a +/- 100 g full range reading and better than 1% linearity w ithin this range with a sensitivity of 0.5 mV/g, The signal detection circuitry is an on-chip switched capacitor charge transfer circuit ope rating on an internally generated 1 MHz four-phase nonoverlapping cloc k, The design takes into account the electrostatic forces, the damping force, and the applied force due to acceleration.