TEMPERATURE-DEPENDENT DRY-CLEANING CHARACTERISTICS OF GAAS (111)B SURFACES WITH A HYDROGEN ELECTRON-CYCLOTRON-RESONANCE PLASMA

Authors
WEEGELS LM SAITOH T KANBE H
Citation
Lm. Weegels et al., TEMPERATURE-DEPENDENT DRY-CLEANING CHARACTERISTICS OF GAAS (111)B SURFACES WITH A HYDROGEN ELECTRON-CYCLOTRON-RESONANCE PLASMA, Applied physics letters, 66(21), 1995, pp. 2870-2872
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
21
Year of publication
1995
Pages
2870 - 2872
Database
ISI
SICI code
0003-6951(1995)66:21<2870:TDCOG(>2.0.ZU;2-Q