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ITA
ENG
ULTRAVIOLET-LIGHT INDUCED ANNIHILATION OF SILICON DANGLING BONDS IN HYDROGENATED AMORPHOUS-SILICON NITRIDE FILMS
Authors
WARREN WL
SEAGER CH
KANICKI J
CROWDER MS
SIGARI E
Citation
Wl. Warren et al., ULTRAVIOLET-LIGHT INDUCED ANNIHILATION OF SILICON DANGLING BONDS IN HYDROGENATED AMORPHOUS-SILICON NITRIDE FILMS, Journal of applied physics, 77(11), 1995, pp. 5730-5735
Citations number
34
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics
→
ACNP
ISSN journal
00218979
Volume
77
Issue
11
Year of publication
1995
Pages
5730 - 5735
Database
ISI
SICI code
0021-8979(1995)77:11<5730:UIAOSD>2.0.ZU;2-H