ULTRAVIOLET-LIGHT INDUCED ANNIHILATION OF SILICON DANGLING BONDS IN HYDROGENATED AMORPHOUS-SILICON NITRIDE FILMS

Authors
WARREN WL SEAGER CH KANICKI J CROWDER MS SIGARI E
Citation
Wl. Warren et al., ULTRAVIOLET-LIGHT INDUCED ANNIHILATION OF SILICON DANGLING BONDS IN HYDROGENATED AMORPHOUS-SILICON NITRIDE FILMS, Journal of applied physics, 77(11), 1995, pp. 5730-5735
Citations number
34
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
11
Year of publication
1995
Pages
5730 - 5735
Database
ISI
SICI code
0021-8979(1995)77:11<5730:UIAOSD>2.0.ZU;2-H