ATOMIC OXYGEN EFFECT ON THE IN-SITU GROWTH OF STOICHIOMETRIC YBA2CU3O7-DELTA EPITAXIAL-FILMS BY FACING TARGETS 90-DEGREES OFF-AXIS RADIOFREQUENCY MAGNETRON SPUTTERING

Authors
OYA G DIAO CC IMAI S UZAWA T SAWADA Y SUGAI T NAKAJIMA K YAMASHITA T
Citation
G. Oya et al., ATOMIC OXYGEN EFFECT ON THE IN-SITU GROWTH OF STOICHIOMETRIC YBA2CU3O7-DELTA EPITAXIAL-FILMS BY FACING TARGETS 90-DEGREES OFF-AXIS RADIOFREQUENCY MAGNETRON SPUTTERING, Journal of applied physics, 77(11), 1995, pp. 5809-5818
Citations number
37
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
11
Year of publication
1995
Pages
5809 - 5818
Database
ISI
SICI code
0021-8979(1995)77:11<5809:AOEOTI>2.0.ZU;2-Z