KINETIC REGULARITIES AND PRODUCTS OF THE THERMAL-DECOMPOSITION OF DICHLOROSILANE

Authors
AIVAZYAN RG DZHABIEV TS KIRYAKOV NV
Citation
Rg. Aivazyan et al., KINETIC REGULARITIES AND PRODUCTS OF THE THERMAL-DECOMPOSITION OF DICHLOROSILANE, Kinetics and catalysis, 36(2), 1995, pp. 162-167
Citations number
24
Categorie Soggetti
Chemistry Physical
Journal title
Kinetics and catalysis → ACNP
ISSN journal
00231584
Volume
36
Issue
2
Year of publication
1995
Pages
162 - 167
Database
ISI
SICI code
0023-1584(1995)36:2<162:KRAPOT>2.0.ZU;2-1
Abstract
The kinetics of the thermal decomposition of dichlorosilane is studied in quartz reactors, including reactors coated with MgO, in a stainles s-steel reactor at 300 - 900 K and 100 - 6500 Pa. Hydrogen, trichloros ilane, and tetrachlorosilane are found to be the principal reaction pr oducts. The conversion increases with temperature. The dependence of t he decomposition rate on the dichlorosilane concentration is presented by the expression W = k[SiH2Cl2](3/2) the effective activation energy is equal to 180 +/- 12 kJ/mol.