CHAIN TRANSFER AS A METHOD FOR MODIFICATI ON OF PMMA-BASED RESISTS

Authors
BULGAKOVA SA SEMCHIKOV YD SEMENOV VV NOVOZHILOV AV KORSAKOV VS MAKSIMOV SI
Citation
Sa. Bulgakova et al., CHAIN TRANSFER AS A METHOD FOR MODIFICATI ON OF PMMA-BASED RESISTS, Vysokomolekularnye soedinenia. Seria A, 37(4), 1995, pp. 706-708
Citations number
4
Categorie Soggetti
Polymer Sciences
Journal title
Vysokomolekularnye soedinenia. Seria A → ACNP
ISSN journal
05075475
Volume
37
Issue
4
Year of publication
1995
Pages
706 - 708
Database
ISI
SICI code
0507-5475(1995)37:4<706:CTAAMF>2.0.ZU;2-Q
Abstract
A method is proposed to enhance the sensitivity to electron beam and s ynchrotron X-rays of poly-methylmethacrylate used as a resist in submi cron lithography. The method is based on the reactions of chain transf er to disilanes of various chemical nature in the course of polymer sy nthesis.