REAL-TIME MONITORING OF EPITAXIAL PROCESSES BY PARALLEL-POLARIZED REFLECTANCE SPECTROSCOPY

Authors
DIETZ N BACHMANN KJ
Citation
N. Dietz et Kj. Bachmann, REAL-TIME MONITORING OF EPITAXIAL PROCESSES BY PARALLEL-POLARIZED REFLECTANCE SPECTROSCOPY, MRS bulletin, 20(5), 1995, pp. 49-55
Citations number
24
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
20
Issue
5
Year of publication
1995
Pages
49 - 55
Database
ISI
SICI code
0883-7694(1995)20:5<49:RMOEPB>2.0.ZU;2-G