PHOSPHORUS DOPING OF SILICON BY PROTON-INDUCED NUCLEAR-REACTIONS

Authors
ABRIL I GARCIAMOLINA R EROKHIN KM KALASHNIKOV NP
Citation
I. Abril et al., PHOSPHORUS DOPING OF SILICON BY PROTON-INDUCED NUCLEAR-REACTIONS, Applied physics letters, 66(22), 1995, pp. 3036-3038
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
22
Year of publication
1995
Pages
3036 - 3038
Database
ISI
SICI code
0003-6951(1995)66:22<3036:PDOSBP>2.0.ZU;2-F