THEORETICAL APPROXIMATIONS FOR DEPTH RESOLUTION CALCULATIONS IN IBA METHODS

One of the most important parameters in depth profiling using ion beam analysis (IBA) is depth resolution. Theoretical approximations are pr esented that lead to relatively fast calculations for the following co ntributions: energy and angular spread of the beam; geometric spread c aused by finite beam size and detector's solid angle; energy stragglin g and multiple scattering in the sample; effect of the absorber foil; energy resolution of the detection method and resonance width in reson ance methods. Multilayered multi-elemental targets are also considered and the different contributions are composed statistically by a metho d that takes into account the peculiar shapes of the corresponding pro bability densities. A computer code, DEPTH, successfully demonstrated the speed and reliability of the calculations.