ANALYTICAL PROBLEMS IN ATOMIC-FORCE MICROSCOPY - DISTORTION OF SURFACE-STRUCTURES DURING IMAGING

Limits in analytical properties of contact mode Atomic Force Microscop e (AFM) induced by influence of the tip shape during imaging of rough surfaces were discussed, For submicrometer structures, simple geometry rules between the tip and the object were established. Analysis of th e effects was performed for the pyramidal tip, 4 mu m in height, with an opening angle of 70 degrees. The contour lines of typical shaped st eps and trenches were considered in evaluation of analytical possibili ties of the AFM. Determination of the tip shape from several AFM image s of different interfaces was shown as an example of reconstruction an alysis.