INFLUENCE OF ION-IMPLANTATION ON THE PROPERTIES OF POLYMER-FILMS

Authors
AZARKO II KARPOVICH IA KOZLOV IP KOZLOVA EI ODZHAEV VB POPOK VN HNATOWICZ V
Citation
Ii. Azarko et al., INFLUENCE OF ION-IMPLANTATION ON THE PROPERTIES OF POLYMER-FILMS, Solid state communications, 95(1), 1995, pp. 49-51
Citations number
6
Categorie Soggetti
Physics, Condensed Matter
Journal title
Solid state communications → ACNP
ISSN journal
00381098
Volume
95
Issue
1
Year of publication
1995
Pages
49 - 51
Database
ISI
SICI code
0038-1098(1995)95:1<49:IOIOTP>2.0.ZU;2-6
Abstract
The effects of ion implantation on the electrical properties were stud ied on several types of polymer films implanted with B+ and N+ ions. T he EPR measurements indicate creation of paramagnetic centers in the i on implanted polymers. The resistivity of polymer films decreases down to 1 Omega cm with the increasing of the ion implantation dose. The c apacitance and the Q-factor depend on the polymer type, current freque ncy, and external bias voltage.