We have investigated the growth of small supported rhodium particles o
n different substrates (mica, Al2O3, NaCl). The particles were deposit
ed in a vacuum from a special source permitting a low evaporation rate
. The particle size, density and crystallographic structure dependenci
es on mean deposit thickness, deposition rate and substrate temperatur
e during the deposition were studied by transmission electron microsco
py and diffraction (TEM and TED). The results showed that it is possib
le to prepare a model Rh catalyst with a well-defined particle populat
ion by vacuum vapour deposition. These catalysts form relatively stabl
e systems with respect to the thermal treatment. It was observed that
the particle density, the mean size and the size dispersion of Rh part
icles are controlled by either atom diffusion or by particle migration
on the substrate. The diffusion of atoms and clusters increases with
the substrate temperature and the growth takes place also by particle
coalescence.