Nuclear resonant reaction analysis techniques for hydrogen depth profi
ling in solid materials typically have used N-15 ion beams at 6.40 MeV
and F-19 ion beams at 6.42 MeV, which require a tandem accelerator. W
e report a new technique using an O-18 ion beam at a resonance energy
of 2.70 MeV, which requires only a single stage accelerator. Improved
values of the nuclear parameters for the 2.70 MeV (O-18) and 6.40 MeV
(N-15) resonances are reported. The beam energy spread was investigate
d for different ions and ion charge states and found to scale with the
charge state. Data obtained using atomic and molecular gas targets re
veal the research potential of Doppler spectroscopy. Examples of hydro
gen depth profiling in solid materials using N-15 and O-18 ion beams a
re presented.