The quality of AlGaAs/GaAs/buffer layer on GaAs HEMTs and of AlGaAs/In
GaAs/GaAs HEMTs is studied on the basis of technological parameter inf
luence: Al mole-fraction in the n-AlGaAs layer, type of the buffer lay
er (p- or n- doped GaAs or AlGaAs), In molefraction in pseudomorphic s
tructures. From the LF drain noise behaviour versus gate and drain bia
ses and temperature (90K to 300K), pseudomorphic devices are found to
present lower drain current noise and less G-R contributions when comp
ared to conventional HEMTs. This difference might result from a lower
deep level concentration.