A novel three element SRAM cell consisting of a gate, a load, and a bi
stable SiGe/Si diode as the storage element is proposed and demonstrat
ed with a test structure, Containing two closely-spaced delta-doped la
yers and a SiGe/Si strained superlattice, the diode exhibits two stabl
e states with a conductance contrast of over six orders of magnitude,
which offers the possibility for the new cell to operate with a low po
wer dissipation, Because the size of the diode can be as small as the
design rules allow, the cell area will be comparable with that of the
conventional DRAM cell, The high speed operation mechanism of the diod
e also provides a potential application for high speed SRAM using this
cell.