We have studied the structure of a stable vicinal SrTiO3(001) surface
by UHV scanning tunneling microscopy. We find that the regular nanosca
le step structure on the vicinal surface strongly influences the growt
h of c-axis-oriented YBa2Cu3O7-delta (YBCO) thin films. It generates a
n almost periodic surface structure of the YBCO films. This substrate-
mediated control of the film growth is particularly important, because
the resultant YBCO microstructure leads to an in-plane anisotropy of
the transport properties in the high-temperature superconducting mater
ial.