NONEQUILIBRIUM PHASE-TRANSITIONS IN QUASI -CHEMICAL REACTIONS SETS OFSILICON DEFECTS DURING ION IMPLANTATION

Authors
PROKOPEV EP
Citation
Ep. Prokopev, NONEQUILIBRIUM PHASE-TRANSITIONS IN QUASI -CHEMICAL REACTIONS SETS OFSILICON DEFECTS DURING ION IMPLANTATION, Izvestia vyssih ucebnyh zavedenij. Himia i himiceskaa tehnologia, 37(7-9), 1994, pp. 18-22
Citations number
12
Categorie Soggetti
Chemistry
Journal title
Izvestia vyssih ucebnyh zavedenij. Himia i himiceskaa tehnologia → ACNP
ISSN journal
05792991
Volume
37
Issue
7-9
Year of publication
1994
Pages
18 - 22
Database
ISI
SICI code
0579-2991(1994)37:7-9<18:NPIQ-R>2.0.ZU;2-W