FABRICATION OF A THICK-FILM SENSOR EMPLOYING AN ULTRASONIC OSCILLATOR

The paper describes the design and fabrication of a sensor using a thi ck him acoustic wave oscillator. The development of a screen printable piezoelectric paste is discussed and an account is given of the funda mental operation of acoustic wave resonant sensors, devices which have traditionally found application in higher-cost, precision application s. The electronic circuitry is also described and experimental results are presented to illustrate how a thick film delay-line oscillator ca n be used as a force sensor.