ANISOTROPIC ETCHING OF GERMANIUM

Authors
LEANCU R MOLDOVAN N CSEPREGI L LANG W
Citation
R. Leancu et al., ANISOTROPIC ETCHING OF GERMANIUM, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 35-37
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
46
Issue
1-3
Year of publication
1995
Pages
35 - 37
Database
ISI
SICI code
0924-4247(1995)46:1-3<35:AEOG>2.0.ZU;2-G
Abstract
An experimental study has been carried out in order to find an anisotr opic etchant for Ge. Both basic and acidic etchants are investigated, with better results for the latter, showing that the chemical differen ces between Ge and Si are essential. The most probable chemical mechan isms responsible for acidic etching and anisotropy are discussed.