POROUS SILICON MEMBRANES FOR GAS-SENSOR APPLICATIONS

Citation
T. Taliercio et al., POROUS SILICON MEMBRANES FOR GAS-SENSOR APPLICATIONS, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 43-46
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
ISSN journal
09244247
Volume
46
Issue
1-3
Year of publication
1995
Pages
43 - 46
Database
ISI
SICI code
0924-4247(1995)46:1-3<43:PSMFGA>2.0.ZU;2-S
Abstract
A porous silicon membrane (PSM) for an electrochemical oxygen microsen sor has been achieved. Both p(+)- and n(+)-type materials have been st udied. On the p(+)-type silicon, the porosity is found to be homogeneo us through the complete thickness of the membrane, while n(+)-type mem branes appear less homogeneous. The permeability of the PSM to oxygen has been tested with the help of a classical sensor. The diffusion pro cess is found to be much more efficient for n(+)-type than for p(+)-ty pe membranes. For PSM thicknesses ranging from 150 to 270 mu m, the di ffusion time varies from 7 to 10 min.