TRANSFER-FUNCTION DETERMINATION OF MICROMECHANICAL STRUCTURES USING ATIME-DOMAIN ANALYSIS AND RESONANCE METHOD

Authors
RUBIO C SAMITIER J RUIZ O BENITEZ MA MONTANE E LOPEZVILLEGAS J MORANTE JR
Citation
C. Rubio et al., TRANSFER-FUNCTION DETERMINATION OF MICROMECHANICAL STRUCTURES USING ATIME-DOMAIN ANALYSIS AND RESONANCE METHOD, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 58-61
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
46
Issue
1-3
Year of publication
1995
Pages
58 - 61
Database
ISI
SICI code
0924-4247(1995)46:1-3<58:TDOMSU>2.0.ZU;2-3
Abstract
A new experimental method to determine the mechanical transfer functio n of microstructures is shown. The method is based on the time domain analysis of the step response. The proposed method allows the characte ristic parameters of exponentially damped sinusoids to be determined; it is a generalization of the analysis of multiexponential transients with real time constants. The easy experimental set-up necessary to pe rform the analysis can be used in different steps of the development p rocess of microsystems.