FIRST STEPS TOWARDS THE FABRICATION OF ELECTROSTATIC MICROMOTORS USING SOG

Authors
CONEDERA V FABRE N CAMON H ROUSSET B PHAM HH SOLANO C
Citation
V. Conedera et al., FIRST STEPS TOWARDS THE FABRICATION OF ELECTROSTATIC MICROMOTORS USING SOG, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 82-84
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
46
Issue
1-3
Year of publication
1995
Pages
82 - 84
Database
ISI
SICI code
0924-4247(1995)46:1-3<82:FSTTFO>2.0.ZU;2-B
Abstract
We have studied the use of spin-on glass (SOG), as a sacrificial layer and source of dopant, for the realization of an electrostatic micromo tor. Some difficulties have been encountered, and we propose a new pro cess based on SOG, a classical POCl3 dopant source and oxidation of po lysilicon to avoid these difficulties.