SPIN DEPOSITION OF POLYMERS OVER HOLES AND CAVITIES

Authors
ELDERSTIG H WALLGREN P
Citation
H. Elderstig et P. Wallgren, SPIN DEPOSITION OF POLYMERS OVER HOLES AND CAVITIES, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 95-97
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
46
Issue
1-3
Year of publication
1995
Pages
95 - 97
Database
ISI
SICI code
0924-4247(1995)46:1-3<95:SDOPOH>2.0.ZU;2-T
Abstract
In this paper we report how polymers can be spin deposited on a perfor ated membrane in order to seal the holes in it. This is a few-temperat ure and potentially low-cost process that is compatible with VLSI proc essing techniques. The method has been demonstrated on a capacitive pr essure sensor. This shows that it has the potential of being widely us ed in future microstructures.