NOVEL FULLY CMOS-COMPATIBLE VACUUM SENSOR

Authors
PAUL O BALTES H
Citation
O. Paul et H. Baltes, NOVEL FULLY CMOS-COMPATIBLE VACUUM SENSOR, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 143-146
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
46
Issue
1-3
Year of publication
1995
Pages
143 - 146
Database
ISI
SICI code
0924-4247(1995)46:1-3<143:NFCVS>2.0.ZU;2-C
Abstract
We present a new CMOS-compatible pressure sensor operating in the rang e of 100-10(6) Pa. The sensor is fabricated in standard CMOS technolog y, followed by simple postprocessing consisting of photolithography an d a sacrificial metal etch. No anisotropic etching of silicon is requi red.