SILICON ACCELEROMETER BASED ON THERMOPILES

Today, silicon sensors are becoming increasingly interesting for appli cations in the consumer industries, such as in washing machines, air c onditioners, cars, home security systems and domestic scales. The mark et for accelerometers is first in the automotive industry, for airbags or ABS; but applications in TV or computer systems are also a possibi lity. For such applications, small and low-cost sensors will be needed in large numbers, which is why silicon sensors will be more advantage ous than conventional sensors. This paper describes the second, much i mproved, design of an accelerometer incorporating thermopiles. This ne w type of accelerometer is relatively insensitive to temperature chang es, mounting stress and interferences from electromagnetic fields. The sensor might be suited to work even under the hostile conditions that occur in automobiles.