THIN-FILM STRAIN-GAUGES ON POLYMERS - MAIN CHARACTERISTICS

Authors
GRANGE H MAEDER C BIETH C RENARD S DELAPIERRE G
Citation
H. Grange et al., THIN-FILM STRAIN-GAUGES ON POLYMERS - MAIN CHARACTERISTICS, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 213-217
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
46
Issue
1-3
Year of publication
1995
Pages
213 - 217
Database
ISI
SICI code
0924-4247(1995)46:1-3<213:TSOP-M>2.0.ZU;2-5
Abstract
We present a new technology to realize thin film strain gauges on poly mer films by cathodic sputtering. We show that high resistance values on small surfaces (>1000 Omega mm(-2)) are feasible and we propose a n ew method to compensate for the test structure creep. Thanks to an ade quate combination of thin film materials (NiCrSi and CuNiMn), accurate weighing measurements (<10(-4) of the full scale of the sensor) are o btained without needing to change the gauge geometry.