VERTICALLY TAPERED SPOT SIZE TRANSFORMERS FABRICATED BY A SIMPLE MASKING TECHNIQUE

Authors
JACOBS B ZENGERLE R FALTIN K WEIERSHAUSEN W
Citation
B. Jacobs et al., VERTICALLY TAPERED SPOT SIZE TRANSFORMERS FABRICATED BY A SIMPLE MASKING TECHNIQUE, Electronics Letters, 31(10), 1995, pp. 794-796
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
31
Issue
10
Year of publication
1995
Pages
794 - 796
Database
ISI
SICI code
0013-5194(1995)31:10<794:VTSSTF>2.0.ZU;2-5
Abstract
A novel, simple fabrication method of vertically tapered spot size tra nsformers is demonstrated by screening the sample partially with a sha dow mask during reactive ion etching. The authors measured a transmiss ion loss of 2.3dB for a single taper structure from the chip waveguide without an antireflection coating on the fibre.