The transient thermal behaviour, based on a rigorous transient thermod
ynamic treatment, of a power VDMOS transistor during turn-off is prese
nted. The time variation of the interior lattice temperature within th
e device is calculated by self-consistently solving the fully coupled
Poisson's equation and transient electron continuity equation together
with the transient heat flow equation. The simulation takes account o
f temperature dependent heat conduction and capacity and includes ther
moelectric currents due to temperature gradient. To make the transient
thermal simulation more robust, a new analytical expression for heat
capacity is used.