In order to create Si nanocrystals we have irradiated amorphous films
of SiO by high energy heavy ions. The electron microscope images clear
ly show crystallites of 15-25 Angstrom size formed inside ion traces o
f similar to 200 Angstrom diameter. The broad luminescence band observ
ed in the visible is attributed to the radiative recombination of phot
oexcited carriers confined in the Si crystallites. We are able to cont
rol the density and the mean size of the nanocrystals by tuning the ir
radiation parameters.