MICROWAVE CHARACTERIZATION OF YBA2CU3O7-X THIN-FILMS GROWN IN-SITU BYOFF-AXIS MAGNETRON SPUTTERING

Authors
SPARVIERI N FIORELLO AM MARESCIALLI L AMBRICO M
Citation
N. Sparvieri et al., MICROWAVE CHARACTERIZATION OF YBA2CU3O7-X THIN-FILMS GROWN IN-SITU BYOFF-AXIS MAGNETRON SPUTTERING, Nuovo cimento della Societa italiana di fisica. D, Condensed matter,atomic, molecular and chemical physics, biophysics, 16(12), 1994, pp. 2005-2010
Citations number
14
Categorie Soggetti
Physics
Journal title
Nuovo cimento della Societa italiana di fisica. D, Condensed matter,atomic, molecular and chemical physics, biophysics → ACNP
ISSN journal
03926737
Volume
16
Issue
12
Year of publication
1994
Pages
2005 - 2010
Database
ISI
SICI code
0392-6737(1994)16:12<2005:MCOYTG>2.0.ZU;2-V
Abstract
Superconducting films of YBa2 Cu-3 O-7-x were deposited in situ on LaA lO3 substrates using single-target 90 degrees off-axis sputtering. The obtained films have tipical T-c values of 91K. Surface resistance mea surements on as-grown films reach 1.1 m Ohm at 77 K and 10 GHz; whilst on ion-etched patterned resonant lines Rs (77 K, 1O GHz) it is about 10 m Ohm.