CORRELATION OF MOLECULAR-HYDROGEN DISSOCIATION AND THE FILM QUALITY OF DIAMOND-LIKE CARBON IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

Authors
CHESHIRE RC GRAHAM WG MORROW T KORNAS V DOBELE HF DONNELLY K DOWLING DP OBRIEN TP
Citation
Rc. Cheshire et al., CORRELATION OF MOLECULAR-HYDROGEN DISSOCIATION AND THE FILM QUALITY OF DIAMOND-LIKE CARBON IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Applied physics letters, 66(23), 1995, pp. 3152-3154
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
23
Year of publication
1995
Pages
3152 - 3154
Database
ISI
SICI code
0003-6951(1995)66:23<3152:COMDAT>2.0.ZU;2-P