EFFECT OF FLUORINE COIMPLANTATION ON MEV ERBIUM IMPLANTED SILICON

Authors
LIU P ZHANG JP WILSON RJ CURELLO G RAO SS HEMMENT PLF
Citation
P. Liu et al., EFFECT OF FLUORINE COIMPLANTATION ON MEV ERBIUM IMPLANTED SILICON, Applied physics letters, 66(23), 1995, pp. 3158-3160
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
23
Year of publication
1995
Pages
3158 - 3160
Database
ISI
SICI code
0003-6951(1995)66:23<3158:EOFCOM>2.0.ZU;2-Y