RAMAN MICROPROBE ANALYSIS OF PATTERNED HIGH-TC SUPERCONDUCTOR (YBCO) THIN-FILMS

MicroRaman spectroscopy is used for studying patterning induced struct ural damage in PLD (Pulsed Laser Deposition) YBaCuO High T-c supercond uctor thin films. The study was focused on the oxygen sublattice vibra tions, which give information about different structural aspects of th e films. A significant oxygen loss and the presence of residual stress es for laser ablation and ion etching patterning procedures were found . No appreciable consequences at the microRaman resolution scale were detected when patterning was done by wet etching with EDTA (Ethylene D iamine Tetra Acetic Acid).