IMPURITY STUDY OF ALUMINA AND ALUMINUM NITRIDE CERAMICS - MICROELECTRONICS PACKAGING APPLICATIONS

Authors
KERNESS ND HOSSAIN TZ MCGUIRE SC
Citation
Nd. Kerness et al., IMPURITY STUDY OF ALUMINA AND ALUMINUM NITRIDE CERAMICS - MICROELECTRONICS PACKAGING APPLICATIONS, Applied radiation and isotopes, 48(1), 1997, pp. 5-9
Citations number
16
Categorie Soggetti
Nuclear Sciences & Tecnology","Radiology,Nuclear Medicine & Medical Imaging","Chemistry Inorganic & Nuclear
Journal title
Applied radiation and isotopes
ISSN journal
09698043 → ACNP
Volume
48
Issue
1
Year of publication
1997
Pages
5 - 9
Database
ISI
SICI code
0969-8043(1997)48:1<5:ISOAAA>2.0.ZU;2-J
Abstract
Results are presented from an impurity comparison study, based on neut ron activation analysis of alumina and aluminum nitride ceramics. For the samples investigated, alumina showed the elements K, Sc, Cr, Fe, C u, Zn, Ga, Se, Zr, Ba, Te, La, Ce, Sm, Dy, Yb and Hf whereas aluminum nitride revealed only Sc, Y, La, Tb, Dy, Yb and W. Both sets of impuri ties exhibited a broad range of concentrations. In addition, the alumi na contained alpha-particle emitters U and Th at concentrations of 420 ng g(-1) (+/- 20%) and 220 ng g(-1) (+/-15%), respectively. Copyright (C) 1997 Elsevier Science Ltd