Nd. Kerness et al., IMPURITY STUDY OF ALUMINA AND ALUMINUM NITRIDE CERAMICS - MICROELECTRONICS PACKAGING APPLICATIONS, Applied radiation and isotopes, 48(1), 1997, pp. 5-9
Citations number
16
Categorie Soggetti
Nuclear Sciences & Tecnology","Radiology,Nuclear Medicine & Medical Imaging","Chemistry Inorganic & Nuclear
Results are presented from an impurity comparison study, based on neut
ron activation analysis of alumina and aluminum nitride ceramics. For
the samples investigated, alumina showed the elements K, Sc, Cr, Fe, C
u, Zn, Ga, Se, Zr, Ba, Te, La, Ce, Sm, Dy, Yb and Hf whereas aluminum
nitride revealed only Sc, Y, La, Tb, Dy, Yb and W. Both sets of impuri
ties exhibited a broad range of concentrations. In addition, the alumi
na contained alpha-particle emitters U and Th at concentrations of 420
ng g(-1) (+/- 20%) and 220 ng g(-1) (+/-15%), respectively. Copyright
(C) 1997 Elsevier Science Ltd