VUV SOURCE FOR PHOTOCHEMICAL DEPOSITION O F THIN DIELECTRIC FILMS

Authors
NISSIM YI FLICSTEIN J VITEL Y DULAC O DEBAUCHE C LICOPPE C
Citation
Yi. Nissim et al., VUV SOURCE FOR PHOTOCHEMICAL DEPOSITION O F THIN DIELECTRIC FILMS, Annales de physique, 19(5), 1994, pp. 229-236
Citations number
11
Categorie Soggetti
Physics
Journal title
Annales de physique → ACNP
ISSN journal
00034169
Volume
19
Issue
5
Year of publication
1994
Supplement
S
Pages
229 - 236
Database
ISI
SICI code
0003-4169(1994)19:5<229:VSFPDO>2.0.ZU;2-D