ELEMENTAL MAPPING USING A FIELD-EMISSION TRANSMISSION ELECTRON-MICROSCOPE WITH AN IMAGING FILTER

An imaging filter has been equipped on a field emission transmission e lectron microscope (FE-TEM) when used for elemental mapping of 3d meta ls like chromium and iron. High spatial resolution of the elemental ma ps can be obtained because of the reduction of the chromatic broadenin g owing to the narrowed energy window and small collection angle, The spatial resolution is estimated as about 1 nm when using a multilayer specimen, Elemental mapping of stainless steels is also performed and the obtained elemental maps of chromium and iron agree fairly well wit h the results obtained by energy-dispersive X-ray spectroscopy (EDX).