FORMATION OF SELF-ALIGNED HOLES IN AN ARBITRARY PATTERN IN SILICON SUBSTRATE

Authors
LEE HD LEE HJ KIM CK HAN CH
Citation
Hd. Lee et al., FORMATION OF SELF-ALIGNED HOLES IN AN ARBITRARY PATTERN IN SILICON SUBSTRATE, Applied physics letters, 66(24), 1995, pp. 3272-3274
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
24
Year of publication
1995
Pages
3272 - 3274
Database
ISI
SICI code
0003-6951(1995)66:24<3272:FOSHIA>2.0.ZU;2-6