The authors present a surface-normal micromachined GaAs Fabry-Perot fi
lter with 70nm of continuous tuning, 19dB extinction ratio, 4.9V of tu
ning voltage, and 50pA tuning current. The device is polarisation inse
nsitive, can be fabricated into two-dimensional arrays, is easy to cou
ple into fibre, and requires only two masks with no critical alignment
s.